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Title :Evaluation of Damping Ratio in a Glass-Based Guided-Wave Optical Microphone with a Diaphragm
Authors :Ohkawa, Masashi
Murata, Kazuya
Sato, Takashi
Publisher :International Society for Optical Engineering, SPIE
Issue Date :Feb-2012
Journal Title :Proceedings of SPIE - the International Society for Optical Engineering
Volume :8264
Start Page :82641I-1
End Page :82641I-6
ISSN :0277-786X
Description :Integrated optics: devices, materials, and technologies 16 : 23-25 January 2012 : San Francisco, California, United States : 16th photonics west conference on integrated optics : SPIE optoelectronics symposium : Jan 2012, San Francisco, CA
Abstract :In a guided-wave optical microphone with a diaphragm used as a vibration plate, damping of diaphragm vibration is very significant in order to realize broad flat frequency response. In this study, a glass-based guided-wave optical microphone without a damping structure was experimentally examined to evaluate the damping ratio as the first phase in the optimization of damping. Damping ratio and resonance frequency were successfully evaluated to be 0.009 and 3.5 kHz, respectively, for a fabricated microphone with a diaphragm of 20 mm × 20 mm × 0.15 mm.
Keywords :microphone
diaphragm
damping
frequency response
integrated photonics
glass waveguide
Type Local :会議発表論文
Language :eng
Format :application/pdf
URI :http://hdl.handle.net/10191/31053
fullTextURL :http://dspace.lib.niigata-u.ac.jp/dspace/bitstream/10191/31053/1/8264_82641I.pdf
DOI :info:doi/10.1117/12.910286
Rights :Copyright 2012 Society of Photo-Optical Instrumentation Engineers
Appears in Collections:06 SPIE

Please use this identifier to cite or link to this item: http://hdl.handle.net/10191/31053