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Title :Multi-frequency sweeping interferometry using spatial optical frequency modulation
Authors :Choi, Samuel
Kato, Heiichi
Sasaki, Osami
Suzuki, Takamasa
Publisher :International Society for Optical Engineering, SPIE
Issue Date :Nov-2012
Journal Title :Proceedings of SPIE - the International Society for Optical Engineering
Volume :8563
Start Page :856302-1
End Page :856302-7
ISSN :0277-786X
Description :Optical metrology and inspection for industrial applications 2 : 5-7 November 2012 : Beijing, China
Abstract :We investigated the interference amplitude and phase characteristics of a multi-frequency sweeping interferometer with sinusoidal phase modulating technique. A novel multi frequency sweeping light source that generated an interval and center frequency variable frequency comb with a bandwidth of 14 nm was demonstrated. The interference phase and amplitude distributions were investigated by observing the zeroth and first order interference signals. In addition, the zeroth and first order interference phase variations caused by center frequency sweeping were measured.
Keywords :Interferometry
Multiple-frequency sweeping
Optical frequency comb
Spatial light modulation
Interference phase measurement
Type Local :会議発表論文
Language :eng
Format :application/pdf
URI :http://hdl.handle.net/10191/31146
fullTextURL :http://dspace.lib.niigata-u.ac.jp/dspace/bitstream/10191/31146/1/8563_856302.pdf
DOI :info:doi/10.1117/12.999555
Rights :Copyright(C)2012 Society of Photo-Optical Instrumentation Engineers
Appears in Collections:06 SPIE

Please use this identifier to cite or link to this item: http://hdl.handle.net/10191/31146