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Title :Absolute measurement of optical surface profile with a Fizeau interferometer
Authors :Sasaki, Osami
Watanabe, Akihiro
Choi, Samuel
Suzuki, Takamasa
Publisher :International Society for Optical Engineering, SPIE
Issue Date :Nov-2012
Journal Title :Proceedings of SPIE - the International Society for Optical Engineering
Volume :8563
Start Page :85630B-1
End Page :85630B-7
ISSN :0277-786X
Description :Optical metrology and inspection for industrial applications 2 : 5-7 November 2012 : Beijing, China
Abstract :An optical surface profile is measured with a laser diode Fizeau interferometer using a method of absolute measurement. Wavefront aberration in the interferometer causes an undesirable phase distribution in the interference signal. To eliminate this phase distribution, the object surface is shifted in two directions orthogonal to each other and the difference wavefront of the surface profile of the object is obtained. An absolute surface profile is estimated by representing the object surface with a polynomial function and by solving the difference equations with least-squares method.
Keywords :absolute measurement
surface profile
difference wavefront
sinusoidal phase modulation
Type Local :会議発表論文
Language :eng
Format :application/pdf
URI :http://hdl.handle.net/10191/31147
fullTextURL :http://dspace.lib.niigata-u.ac.jp/dspace/bitstream/10191/31147/1/8563_85630B.pdf
DOI :info:doi/10.1117/12.2000145
Rights :Copyright(C)2012 Society of Photo-Optical Instrumentation Engineers
Appears in Collections:06 SPIE

Please use this identifier to cite or link to this item: http://hdl.handle.net/10191/31147