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Title :Real-time displacement measurement using VCSEL interferometer
Authors :Suzuki, Takamasa
Yamada, Noriaki
Sasaki, Osami
Choi, Samuel
Publisher :International Society for Optical Engineering, SPIE
Issue Date :Nov-2012
Journal Title :Proceedings of SPIE - the International Society for Optical Engineering
Volume :8563
Start Page :85630K-1
End Page :85630K-6
ISSN :0277-786X
Description :Optical metrology and inspection for industrial applications 2 : 5-7 November 2012 : Beijing, China
Abstract :A displacement sensor that uses a vertical cavity surface emitting laser (VCSEL), which is superior in terms of remediation of the mode-hop issue and modulation efficiency, is proposed. The interference signal in the sensor is processed with the phase-locked technique. This device allows real-time measurement of displacement. No unstable signals due to mode-hop were observed in the experiments. Displacement measurements recorded with this device indicated that it has an rms measurement accuracy of 0.3 μm and 50 nm for displacements of 150 μm and 1.2 μm, respectively.
Keywords :displacement sensor
laser diode
vertical cavity surface emitting laser diode
Type Local :会議発表論文
Language :eng
Format :application/pdf
URI :http://hdl.handle.net/10191/31149
fullTextURL :http://dspace.lib.niigata-u.ac.jp/dspace/bitstream/10191/31149/1/8563_85630K.pdf
DOI :info:doi/10.1117/12.999720
Rights :Copyright(C)2012 Society of Photo-Optical Instrumentation Engineers
Appears in Collections:06 SPIE

Please use this identifier to cite or link to this item: http://hdl.handle.net/10191/31149