|
新潟大学学術リポジトリ Nuar >
060 工学部 = Faculty of Engineering >
40 学会発表資料 = Conference Paper/Presentation >
06 SPIE >
| |
|
|
| Title | : | Real-time displacement measurement using VCSEL interferometer |
| Authors | : | Suzuki, Takamasa
Yamada, Noriaki
Sasaki, Osami
Choi, Samuel |
| Publisher | : | International Society for Optical Engineering, SPIE |
| Issue Date | : | Nov-2012 |
| Journal Title | : | Proceedings of SPIE - the International Society for Optical Engineering |
| Volume | : | 8563 |
| Start Page | : | 85630K-1 |
| End Page | : | 85630K-6 |
| ISSN | : | 0277-786X |
| Description | : | Optical metrology and inspection for industrial applications 2 : 5-7 November 2012 : Beijing, China |
| Abstract | : | A displacement sensor that uses a vertical cavity surface emitting laser (VCSEL), which is superior in terms of remediation of the mode-hop issue and modulation efficiency, is proposed. The interference signal in the sensor is processed with the phase-locked technique. This device allows real-time measurement of displacement. No unstable signals due to mode-hop were observed in the experiments. Displacement measurements recorded with this device indicated that it has an rms measurement accuracy of 0.3 μm and 50 nm for displacements of 150 μm and 1.2 μm, respectively. |
| Keywords | : | displacement sensor
laser diode
interferometer
vertical cavity surface emitting laser diode |
| Type Local | : | 会議発表論文 |
| Language | : | eng |
| Format | : | application/pdf |
| URI | : | http://hdl.handle.net/10191/31149 |
| fullTextURL | : | http://dspace.lib.niigata-u.ac.jp/dspace/bitstream/10191/31149/1/8563_85630K.pdf |
| DOI | : | info:doi/10.1117/12.999720 |
| Rights | : | Copyright(C)2012 Society of Photo-Optical Instrumentation Engineers |
| Appears in Collections | : | 06 SPIE
|
|
Please use this identifier to cite or link to this item:
http://hdl.handle.net/10191/31149
|
|
|
